Ultrafast laser machining system and method for forming diffractive structures in optical fibers

ABSTRACT

An ultrafast laser machining system and method to form diffractive structures in optical fibers. The fiber is mounted with its longitudinal axis perpendicular to the beam path of the laser pulses. A region of the fiber is illuminated and then imaged with two cameras. These cameras are aligned substantially orthogonally. A position of the beam spot is determined. The beam spot is aligned to a starting position within the region. This position is within a portion of the fiber to be machined for which the beam path passes through the greatest length of material. The beam spot is scanned along a path designed to pass the beam spot through all of the portion to be machined such that the beam path does not pass through previously machined material. The laser pulses, which have a duration of less than about 1 ns, are generated as the beam spot is scanned.

This application claims the benefit under Title 35 U.S.C. § 119(e) ofU.S. Provisional Application No. 60/623,285 filed on Oct. 29, 2004 andU.S. Provisional Application No. 60/623,286 filed on Oct. 29, 2004, thecontents of which a incorporated herein by reference.

FIELD OF THE INVENTION

The present invention relates generally to systems and methods for thelaser machining of structures within optical fibers. More particularlythese systems and methods may be used to form long period Bragggratings, photonic crystal structures, and/or diffractive opticalelements within the cores of optical fibers.

BACKGROUND OF THE INVENTION

A Bragg grating is a periodic or aperiodic perturbation of the effectiveabsorption coefficient and/or the effective refractive index of anoptical waveguide. More simply put, a Bragg grating can reflect apredetermined narrow or broad range of wavelengths of light incident onthe grating, while passing all other wavelengths of the light. Suchstructures provide a desirable means to manipulate light traveling inthe optical waveguide.

A fiber Bragg grating (FBG) is a Bragg grating formed in an opticalfiber. FBG's may be formed from photo-imprinted gratings in opticalfibers. Photo-imprinting involves the irradiation of an opticalwaveguide with a laser beam of ultraviolet light to change therefractive index of the core of the waveguide. By irradiating the fiberwith an intensive pattern that has a periodic (or aperiodic)distribution, a corresponding index perturbation is permanently inducedin the core of the waveguide. The result is an index grating that isphoto-imprinted in the optical waveguide. This method requires that theglass be photosensitive, an effect discovered in 1978 by Dr. KennethHill of the Communications Research Centre Canada.

The FBG may become a very selective spatial reflector in the core of thefiber. Any change to the spatial period of the grating, or index ofrefraction, causes a proportional shift in the reflected and transmittedspectrum. FBG's have proven attractive in a wide variety of opticalfiber applications, such as: narrowband and broadband tunable filters;optical fiber mode converters; wavelength selective filters,multiplexers, and add/drop Mach-Zehnder interferometers; dispersioncompensation in long-distance telecommunication networks; gainequalization and improved pump efficiency in erbium-doped fiberamplifiers; spectrum analyzers; specialized narrowband lasers; andoptical strain gauges in bridges, building structures, elevators,reactors, composites, mines and smart structures.

Since their market introduction in 1995, the use of optical FBG's incommercial products has grown exponentially, largely in the fields oftelecommunications and stress sensors. The demand for more bandwidth intelecommunication networks has rapidly expanded the development of newoptical components and devices (especially Wavelength DivisionMultiplexers). FBG's have contributed to the phenomenal growth of someof these products, and are recognized as a significant enablingtechnology for improving fiber optic communications.

Photo-imprinted FBG's may have low insertion losses and are compatiblewith existing optical fibers used in telecommunication networks, but asthe optical power being transmitted in a photo-imprinted FBG increases,some undesirable effects may arise. One drawback of photo-imprintedFBG's is the requirement that the optical fiber have a photosensitivecore. Photosensitive materials typically have absorption coefficientshigher than are desirable for high power applications, as well aspotentially undesirable non-linearities that may become large at highoptical powers. Photo-imprinted FBG's are also susceptible todegradation over time, particularly is the photosensitive material ofthe fiber core is heated or exposed to UV radiation.

In their article, FIBER BRAGG GRATINGS MADE WITH A PHASE MASK AND 800-NMFEMTOSECOND RADIATION (Optics Letters, Vol. 28, No. 12, pgs. 995-97(2003)), Stephen J. Mihailov, et al. disclose a first order FBG formedin a single mode fiber using a femtosecond laser. The single mode fiberused was a standard SMG-28 telecommunications fiber with anon-photosensitive Ge doped core. The authors were able to form a firstorder Bragg grating structure in this core. This direct laser writtensingle mode FBG was found to have superior thermal stability as comparedto a photo-imprinted FBG.

The direct laser written single mode FBG of Stephen J. Mihailov, et al.may overcome many of the disadvantages of the photo-imprinted FBG's.Such single mode FBG's may be formed using the relatively standardultrafast laser machining system disclosed by Stephen J. Mihailov, etal. The formation of more complex diffractive structures within opticalfibers, particularly three dimensional structures formed withinmultimode optical fibers, such as diffractive coupling optics andphotonic crystals, may benefit from the use of an exemplary ultrafastlaser machining system with additional monitoring and control featuresas described in the present invention. The present invention also allowsa number of additional improvements even to less complex diffractivestructures formed within optical fibers that may lead to superiorperformance, particularly at higher power levels, as well as increasingthe versatility of the diffractive structures that may be formed.

SUMMARY OF THE INVENTION

An exemplary embodiment of the present invention is an ultrafast lasermachining system to form a diffractive structure in an optical fiber.The ultrafast laser machining system includes: a pulsed laser source forgenerating pulses of laser light; optics aligned in a beam path of laserpulses to focus the pulses to a beam spot; a fiber mount to hold andcontrollably move the optical fiber such that the beam spot is alignedto a target region within the optical fiber; and an imaging system toimage the target region. Each pulse of laser light has a pulse energyequal to a machining energy level and a predetermined pulse width lessthan about 1 ns. The fiber mount includes: a first linear translationstage to move the optical fiber in the Z direction, substantiallyparallel to a direction of propagation of the laser pulses; a secondlinear translation stage to move the optical fiber in the Y direction,substantially perpendicular to the direction of propagation of the laserpulses and substantially parallel to the longitudinal axis of theoptical fiber; and a fiber holder coupled to the two linear translationstages to hold the optical fiber. The imaging system includes a lightsource to illuminate the target region of the optical fiber and twodigital cameras aligned to image the target region of the held opticalfiber from substantially orthogonal directions.

Another exemplary embodiment of the present invention is an ultrafastlaser machining system to form a Bragg grating structure in an opticalfiber. The ultrafast laser machining system includes: a pulsed lasersource for generating pulses of laser light; a beam divider aligned inthe beam path of the pulses of laser light to divide the beam path intomultiple branches; optics aligned in the branches of the beam path oflaser pulses to focus the pulses to multiple beam spots havingsubstantially equal fluence; a fiber mount to hold and controllably movethe optical fiber such that each beam spot is aligned to a target regionwithin the optical fiber; and an imaging system to image the targetregion. Each pulse of laser light has a pulse energy equal to amachining energy level and a predetermined pulse width less than about 1ns. A portion of each pulse of laser light is propagated along each ofthe branches and each beam spot corresponds to one of these branches.The fiber mount includes: a linear translation stage to move the opticalfiber in the Z direction, substantially parallel to a direction ofpropagation of the laser pulses; and a fiber holder coupled to thelinear translation stages to hold the optical fiber. The imaging systemincludes a light source to illuminate the target region of the opticalfiber and two digital cameras aligned to image the target region of theheld optical fiber from substantially orthogonal directions.

An additional exemplary embodiment of the present invention is a methodto form a diffractive structure in an optical fiber using an ultrafastlaser machining system. The optical fiber is mounted in a fiber mount ofthe ultrafast laser machining system with the longitudinal axis of theoptical fiber perpendicular to the beam path of pulses of laser light ofthe ultrafast laser machining system. A target region of the opticalfiber is illuminated with illumination light and the target region isimaged with two digital cameras. The digital cameras are aligned insubstantially orthogonal directions to produce pairs of substantiallyorthogonal alignment images of the target region. An initial position,within the target region, of the beam spot formed by a focusingmechanism of the ultrafast laser machining system is determined. Thebeam spot is aligned to a starting position within the target region ofthe optical fiber. The starting position is within a portion of theoptical fiber to be machined to form the diffractive structure for whichthe beam path of the laser pulses passes through the greatest length ofoptical fiber material to reach the beam spot. The beam spot is scannedalong a machining path within the target region of the optical fiber.The machining path is designed to pass the beam spot through all of theportion of the optical fiber to be machined such that the beam path doesnot pass through previously machined material of the optical fiber. Thepulses of laser light, which have a duration of less than about 1 ns,are generated to machine material of the optical fiber as the beam spotis scanned, thereby forming the diffractive structure within the opticalfiber.

A further exemplary embodiment of the present invention is a method toform a repetitive diffractive structure in an optical fiber using anultrafast laser machining system with multiple parallel processing beampaths. The optical fiber is mounted in a fiber mount of the ultrafastlaser machining system with the longitudinal axis of the optical fiberperpendicular to the parallel processing beam paths of pulses of laserlight of the ultrafast laser machining system. A target region of theoptical fiber is illuminated with illumination light and the targetregion is imaged with two digital cameras. The digital cameras arealigned in substantially orthogonal directions to produce pairs ofsubstantially orthogonal alignment images of the target region. Initialpositions, within the target region, of the multiple beam spots formedby a focusing mechanism of the ultrafast laser machining system aredetermined. Each of the beam spots corresponding to one of the parallelprocessing beam paths of the ultrafast laser machining system. Each beamspot is aligned to one of a number of starting positions within thetarget region of the optical fiber. Each starting position is within aportion of the optical fiber to be machined to form the diffractivestructure for which the corresponding one of the parallel processingbeam paths passes through the greatest length of optical fiber materialto reach the beam spot. Each beam spot is scanned in parallel along oneof a number of machining paths within the target region of the opticalfiber. Each machining path is designed to pass the corresponding beamspot through all of the portion of the optical fiber to be machined toform the corresponding section of the repetitive diffractive structuresuch that none of the parallel processing beam paths passes throughpreviously machined material of the optical fiber. The pulses of laserlight, which have a duration of less than about 1 ns, are generated tomachine material of the optical fiber as the parallel processing beampaths are scanned in parallel, thereby forming the repetitivediffractive structure within the optical fiber.

It is to be understood that both the foregoing general description andthe following detailed description are exemplary, but are notrestrictive, of the invention.

BRIEF DESCRIPTION OF THE DRAWING

The invention is best understood from the following detailed descriptionwhen read in connection with the accompanying drawing. It is emphasizedthat, according to common practice, the various features of the drawingare not to scale. On the contrary, the dimensions of the variousfeatures are arbitrarily expanded or reduced for clarity. Included inthe drawing are the following figures.

FIG. 1 is a schematic block diagram illustrating an exemplary ultrafastlaser machining system according to the present invention.

FIG. 2 is a schematic block diagram illustrating an alternativeexemplary ultrafast laser machining system according to the presentinvention.

FIG. 3A is a top schematic diagram illustrating an exemplary imagingsystem to image the target region of the held optical fiber in anexemplary ultrafast laser machining system of FIG. 1 or 2.

FIG. 3B is a top schematic diagram illustrating an alternative exemplaryimaging system to image the target region of the held optical fiber inan exemplary ultrafast laser machining system of FIG. 1 or 2.

FIG. 4A is a side plan drawing (viewed in a direction perpendicular tothe beam path of an exemplary multiple branch ultrafast laser machiningsystem according to the present invention) illustrating exemplary beamspot locations within an optical fiber.

FIGS. 4B and 4C are side plan drawings (viewed in the beam pathdirection of an exemplary multiple branch ultrafast laser machiningsystem according to the present invention) illustrating two alternativeexemplary beam spot locations within an optical fiber.

FIG. 5 is a flowchart illustrating an exemplary method of lasermachining a diffractive structure in an optical fiber according to thepresent invention.

FIG. 6 is a flowchart illustrating an exemplary method of lasermachining a repetitive diffractive structure in an optical fiberaccording to the present invention.

FIGS. 7A and 7B are schematic block diagrams illustrating exemplary insitu fiber monitors according to the present invention.

DETAILED DESCRIPTION OF THE INVENTION

The extremely high intensities achievable in ultrafast laser machiningof materials allow the material to be changed in a number of ways. Themost common way that a material may be changed during ultrafast lasermachining is for the material to be removed from the surface viaablation. Alternatively, various properties of the material may bechanged such as the crystallinity and/or the refractive index. Thesematerial changes may occur on the surface of the material or, forsubstantially transparent materials, the ultrafast pulses may be focusedwithin the material to cause these changes to take place inside of thebulk of the material. These internal changes may occur only above aspecific fluence, so that the intervening material may be unaffected bythe ultrafast laser pulses. Careful control of the pulse energy, pulseduration, and focus of the pulses may allow for the creation of preciseregions with changed properties that have sharp boundaries.

Thus, the use of ultrafast lasers for direct writing of Bragg gratingstructures in optical fibers may have the advantage of providing sharpcontrasts between index-altered portions of the fiber and surroundingunaltered portions of the fiber.

Single mode optical fibers have relatively small fiber cores, typicallyless that 9 μm for telecommunication wavelengths. Additionally, sincelight propagates in only one mode in these fibers, there are relativelyfew diffractive optical structures that may be useful in these fibers.Multimode fibers, however, have significantly more space for formingstructures within the core. Typical multimode fiber core radii rangefrom about 10 μm to about 200 μm, with 25 μm and 31.25 μm being the mostcommon multimode fiber core radii for telecommunication wavelengths.Also, the multiple transverse modes utilized by light propagating inmultimode fibers lead to a large number of potential structural formsfor controlling and monitoring light in these fibers.

Using the exemplary apparatus and methods of the present invention,diffractive structures may also be formed in multicore optical fibers,whether the multiple cores are arranged side by side or coaxially. Theseexemplary diffractive structures may affect the propagation of lightwithin the different cores of the multicore fiber or the may couplemodes between the cores. Additionally, diffractive structures may beformed, using the exemplary apparatus and methods of the presentinvention, in elliptical and other polarization maintaining opticalfibers.

Thus, applying ultrafast laser machining techniques to multimode opticalfibers creates a significant expansion of the potential uses of directlaser written structures in optical fibers over the first order, singlemode FBG's disclosed in the article by Stephen J. Mihailov, et al. Theseexemplary structures include: multimode long period FBG's (LPFBG's);multimode optical fibers with helical FBG structures, integral photoniccrystal sections, and/or diffractive coupling optics; optical fibers(including high power, hollow fibers) with FBG's formed in the claddinglayer; and wavelength stabilized, high power, uncooled laser sources.

FIGS. 1 and 2 illustrate simplified block diagrams of two exemplaryultrafast laser machining systems for forming diffractive structureswithin optical fibers according to the present invention. The exemplarysystem of FIG. 1 includes: ultrafast laser oscillator 100; shutter 102;variable attenuator 104; harmonic generating crystal 106; dichroicmirrors 108 and 118; polarization control means 110; a beam dividerincluding lenses 112 and 114 and mask 116; focusing mechanism 120; afiber mount which includes fiber holder 122 and positioning apparatus123; and an imaging system including light source 130, beam splitter128, and digital camera 132. The optical paths in the exemplary systemare shown as dotted lines 134, 136, and 138. The exemplary system ofFIG. 2 is similar to the exemplary system of FIG. 1, except that itincludes an alternative beam divider, focusing mechanism, and imagingsystem.

It is noted that, although the imaging system of an exemplary system ofthe present invention desirably includes two digital cameras aligned toimage target region 126 of held optical fiber 124 from substantiallyorthogonal directions, the exemplary block diagrams of FIGS. 1 and 2each illustrate only one digital camera. The second camera has beenomitted in these Figures to simplify the drawings. FIGS. 3A and 3Billustrate exemplary imaging systems including two digital cameras todemonstrate two possible alignments of a second camera in FIGS. 1 and 2.

In this exemplary system, ultrafast laser oscillator 100 may desirablyinclude any type of solid state gain medium typically used for ultrafastlaser machining applications, such as: Cr:YAG (peak fundamentalwavelength, λf=1520 nm); Cr:Forsterite (λf=1230-1270 nm); Nd:YAG andNd:YVO4 (λf=1064 nm); Nd:GdVO4 (λf=1063 nm); Nd:YLF (λf=1047 nm and 1053nm); Nd:glass (λf=1047-1087 nm); Yb:YAG (λf=1030 nm); Cr:LiSAF(λf=826-876 nm); Ti:Sapphire (λf=760-820 nm); and Pr:YLF (λf=612 nm).These solid state gain media may be pumped using standard opticalpumping systems such as erbium doped fiber lasers and diode lasers, theoutput pulses of which may be directly coupled into the solid state gainmedium or may undergo harmonic generation before being used to pump thesolid state gain medium. The solid state gain medium (media) may beconfigured to operate as one or more of: a laser oscillator; a singlepass amplifier; and/or a multiple pass amplifier. This element may alsoinclude optics to substantially collimate the laser light.

Ultrafast laser oscillator 100 may desirably produce nearlyFourier-transform limited pulses having a duration of less than about 1ns, typically less than 50 ps. These pulses are desirably produced atrepetition rate at least in the KHz range. Higher pulse repetition ratesare generally desirable to allow more rapid machining of the exemplarygrating structures, as long as there is sufficient time between thepulses to allow heat dissipation within the optical fiber. Pulserepetition rates as high as 200 MHz or greater are contemplated.

An additional, non-solid state, single or multiple pass amplifier suchas a XeCl, KrF, ArF, or F2 excimer amplifier (not shown) may be includedto increase the output power of ultrafast laser oscillator 100.Alternatively, ultrafast laser oscillator 100 may include an ultrafastexcimer laser system (e.g. XeCl, λf=308 nm; KrF, λf=248 nm; ArF, λf=193nm; or F2, λf=157 nm) or an ultrafast dye laser system (e.g.7-diethylamino-4-methylcoumarin, λf=435-500 nm; benzoic acid,2-[6-(ethylamino)-3-(ethylimino)-2,7-dimethyl-3H-xanthen-9-yl]-ethylester, monohydrochloride, λf=555-625 nm;4-dicyanmethylene-2-methyl-6-(p-dimethylaminostyryl)-4H-pyran,λf=598-710 nm; or2-(6-(4-dimethylaminophenyl)-2,4-neopentylene-1,3,5-hexatrienyl)-3-methylbenzothiazoliumperchlorate, λf=785-900 nm).

Shutter 102, aligned in beam path 134, may be used to controltransmission of the pulsed laser light laser from laser source 100 (i.e.open during machining and closed to block the beam when not machining).This may extend the life of other components in the exemplary lasermachining system and allow for the use of scanning techniques such asraster scanning in exemplary embodiments of the present invention.

Variable attenuator 104 desirably allows for fine control of the pulseenergies, and thus the beam fluence, to maintain a desirable machiningenergy level. Variable attenuator 104 may be any type of controllablevariable attenuator that may withstand the high peak powers associatedwith ultrafast lasers, for example a pair of linear polarizing membersarranged on either side of a controllable polarization rotation elementsuch as a Pockels cell, Kerr cell, or a liquid crystal. Alternatively, afixed linear polarizing member and a rotatable polarization member maybe used as variable attenuator 104. The resulting control of pulseenergies, possibly in conjunction with control of the focus of the beamsspot(s), allows fine control of the fluence of the laser pulses in thebeam spot(s) in the target region 126 of held optical fiber 124, therebycontrolling the machining volume of target region 126 machined by a beamspot during one of the pulses of laser light. The fine control of thefluence may allow exemplary systems of the present invention to machinevolumes which are either larger or smaller than the minimum spot sizethat may be achieved for light of a particular wavelength with a singlepulse. Variable attenuator 104 may also be used to vary the beam fluenceused for machining and/or alignment, while desirably allowing lasersource 100 to be operated at a constant pulse power level, even duringthe generating of lower fluence alignment pulses.

The attenuated beam then enters harmonic generating crystal 106. Thiscrystal may be designed to double, triple, or quadruple the fundamentalfrequency of the laser pulses generated by ultrafast laser oscillator100 to produce ultrafast UV pulses, which may desirably have a peakwavelength shorter than about 388 nm and a duration of less than 1 nsand preferably less than 50 ps. The efficiency of harmonic generation inharmonic generating crystal 106 may vary with the thickness of thecrystal. Also, the efficiency of harmonic generating crystal 106 mayvary with the intensity of the fundamental light incident on the crystaland, thus, the selection of the desired attenuation of variableattenuator 104 desirably accounts for this variable as well. It is notedthat harmonic generation crystals may desirably be optimized to providedesirable phase matching for a particular input fundamental wavelengthand harmonic number. Therefore, although it may be possible to tune thepeak wavelength of ultrafast laser oscillator 100 over a significantrange, such tuning may not be desirable for harmonic generation.

Also, it is noted that for ultrafast laser pulses of less than 1 ns, asdesired in the present invention, the Fourier-transform limitedbandwidth of these pulses may be relatively broad. Harmonic generationusing such broad bandwidth is complicated by the desired phase matchingcriteria between the fundamental and harmonic at the output side ofharmonic generating crystal 106. One method to achieve the desired phasematching criteria for these relatively broad bandwidth pulses is toreduce the thickness of harmonic generating crystal 106, which may lowerthe efficiency of harmonic generation.

It is noted that the primary machining mechanism for ultrafast laserpulses typically does not involve single photon absorption. Therefore,using harmonic generating crystal 106 to reduce the peak wavelength ofthe ultrafast laser pulses only minimally affects the volume of materialmachined at a given fluence. Rather, the main effect of reducing thepeak wavelength of the ultrafast laser pulses is to reduce the minimumbeam spot that may be achieved by focusing mechanism 120.

Polarization control means 110 may be aligned in beam path 134 todesirably control the polarization of the laser pulses, preferablytransforming their polarization to circular polarization. The use ofcircularly polarized light and a round cross section beam spot has beenfound to produce consistently ellipsoidal machining areas with roundcross-sections within the body of a work piece, including sphericalmachining areas. Thus, circularly polarized light may be desirable toform the most reproducible features by laser machining. The laser pulsesincident on polarization control means 110 may be linearly polarized, inwhich case polarization control means 110 is desirably a quarter waveplate optimized for the peak wavelength of the laser pulses. This isparticularly likely if variable attenuator 104 is a polarization basedattenuator. If the laser pulses incident on polarization control means110 are not polarized already, polarization control means 110 maydesirably include a linear polarizing member followed by a quarter waveplate. The bandwidth of the laser pulses may mean that not all of thewavelengths may be nearly circularly polarized by the quarter waveplate, but, for a nearly Fourier-transform limited pulse, the majorityof the energy in the pulse should be at wavelengths close enough to thepeak wavelength to ignore this effect.

Desirably, both mirror 108 and mirror 118 are dichroic mirrors designedto have a high reflectivity (>95%) throughout the bandwidth of thepulses, as well as desirably minimal absorption at the fundamentalwavelength of ultrafast laser oscillator 100, and any harmonics thatmight be generated in harmonic generating crystal 106. Exemplarydichroic mirrors may also desirably have high transmission (>99%) forshorter wavelengths, such as the fundamental wavelength of ultrafastlaser oscillator 100 if harmonic generating crystal 106 is used, as wellas the peak wavelength of light source 130 of the imaging system,particularly if optical beam 136 of light source 130 is aligned toirradiate target area 126 along the same optical path as optical beam134 of laser source 100, as shown in the exemplary system of FIG. 1.These dichroic mirrors are desirably formed of a large number ofdielectric layers, with thicknesses on the order of the peak wavelengthof the laser pulses. The broader the desired high reflectivity bandwidthof these dichroic mirrors, the more complex this layered dielectricstructure becomes. Thus, it is desirable to substantially maintain thebandwidth of these pulses near their Fourier-transform limit.

This pair of mirrors, 108 and 118, allows steering of optical beam 134and, also, helps to prevent any unwanted light that may be emitted fromharmonic generating crystal 106 at the fundamental wavelength, or lowerharmonics than the desired harmonic of the laser pulses, from reachingthe target area 126 on optical fiber 124. Dichroic mirror 118 may alsodesirably allow optical beam 136 from light source 130 to be efficientlytransmitted for illuminating and imaging optical fiber 124.

An alternative embodiment of the present invention, described below withreference to FIG. 6, uses an ultrafast laser machining system thatincludes a beam divider aligned in the beam path of the pulses of laserlight to divide the beam path into a number of branches. Thisalternative embodiment may allow for repetitive diffractive structuresto be formed in parallel within optical fiber 124. In this alternativeexemplary embodiment a portion of each pulse of laser light ispropagated along each of the branches to form a separate beam spotwithin optical fiber 124. These multiple beam spots desirably havesubstantially equal pulse energies and fluences.

FIG. 1 illustrates an exemplary ultrafast laser machining system thatincludes mask 116 as a beam divider. Mask 116 includes multiple pinholescorresponding to the branches. If these pinholes are irradiated bysubstantially collimated light, the resulting branches propagatesubstantially parallel to one another. The pinholes in mask 116 may bedesirably formed in a line to allow parallel processing of thediffractive structure along the length of optical fiber 124, or may beformed in another desired pattern. The pinholes in mask 116 may be sizedand spaced to form the desired set of beam spots when focused byfocusing mechanism 120. Both the type of focusing mechanism used and themagnification of the focusing mechanism may affect the sizing andspacing of the pinholes of mask 116.

Optical beam 134 may be expanded by a beam expander, illustrated aslenses 112 and 114 in FIG. 1, to allow for more even and/or efficientirradiation of the pinholes of mask 116 by the pulses of laser light inoptical beam 134. For example, a beam expander formed of two cylindricallenses 112 and 114 may expand the height of the beam path withoutexpanding the width. Such an exemplary beam shape may be desirable toirradiate a line of pinholes formed in mask 116 with less wasted laserpulse energy. Lenses 112 and 114 have desirably low absorptivity and lowchromatic aberration within the bandwidth of the laser pulses.Alternatively, spherical or aspherical lens based beam expanders ordiffractive optical element beam shapers may be used to provide a moredesirable beam shape for irradiating the pinholes of mask 116.

FIG. 2 illustrates an exemplary beam divider that includes diffractiveoptical element (DOE) 200. This diffractive optical element may dividethe laser pulses of optical beam 134 into a number of branches havingsubstantially equal pulse energies more efficiently that mask 116. Thebranches formed by DOE 200 propagate in separate directions, rather thansubstantially parallel, as with exemplary mask 116 of FIG. 1. Oneskilled in the art may understand that, the tradeoff between theincreased efficiency of DOE 200 and the substantially parallel branchesformed by using mask 116 may lead to the selection of one of theseexemplary beam dividers, depending on the desired application.

In the exemplary system of FIG. 1, mirror 118 guides optical beam 134into focusing mechanism 120 to focus the pulses of laser light to a beamspot within target region 126. This beam spot may be substantiallydiffraction limited or it may be larger depending on the size of thediffractive structures to be formed in optical fiber 124. For example,the optics may focus the laser pulses such that the beam spot has amachining volume from about 0.001 μm³ to greater than hundreds of μm³,the machining volume defining a portion of the target region machined byone of the plurality of pulses of laser light, which may not match thevolume of the beam spot waist. This is because as the optical beam, orbranch thereof, is focused; the fluence of the beam increases,eventually reaching a machining fluence level. This is the mechanismthat allows an ultrafast pulsed laser system to machine material insideof a substantially transparent body, such as an optical fiber.

Thus, focusing mechanism 120 desirably has a relatively high numericalaperture. A higher numerical aperture allows focusing mechanism 120 tomore precisely control the depth at which laser machining of opticalfiber 124 begins. The steep cone angles achievable using high numericalaperture optics may be desirable to decrease the distance within thebeam spot, in the direction of propagation, in which the machiningfluence is reached. However, a higher numerical aperture also reducesthe working distance between focusing mechanism 120 and optical fiber124. The desired working distance may be based on many factors, but itmay be desirable to have a working distance of greater than 0.8 mm,which may translate into a numerical aperture of about 0.5±0.1,depending on the size of optical beam 134. Working distances of greaterthan about 1.5 mm may undesirably lower the numerical aperture; howeverthis does not exclude such working distances.

Thus, focusing mechanism 120 may desirably include a microscopeobjective with a numerical aperture in the range of up to about 1.5.Alternatively, other lens systems, including: singlet lenses; doubletlenses; aspheric lenses; and/or cylindrical lenses, may be included infocusing mechanism 120. High numerical aperture oil immersed lenssystems may be used in focusing mechanism 120 to allow steep coneangles. Focusing mechanism 120 may desirably have a magnification in therange of about 1 to 100 times. The use of a microscope objective infocusing mechanism 120 may be particularly desirable for exemplary lasermachining systems that use a single beam spot. Exemplary laser machiningsystems that use a mask to form multiple substantially parallel branchesmay also work well with microscope objectives or may use an array ofmicrolenses with each microlens aligned in one of the branches of thebeam path.

In the exemplary system of FIG. 2, which includes DOE 200, the optics ofthe focusing mechanism desirably include scan lens 202, which maypreferably be a telecentric scan lens. Alternatively, an array ofmicrolenses may be used with DOE 200 in the exemplary embodiment of FIG.2. It is noted that it may be desirable for each of the microlenses inthis alternative exemplary embodiment to be scan lenses.

FIGS. 4A-C illustrate exemplary machining areas within optical fiber124. FIG. 4A is a side view of optical fiber 124 in a directionperpendicular the direction of propagation of parallel branches 408.These three branches are focused through cladding layer 402 to beamspots 406 in fiber core 400. Focusing the three beam spots 406 ofbranches 408 to the same depth as shown in FIG. 4A may be desirable, butis not necessary. FIGS. 4B and 4C illustrate two exemplary arrangementsof beam spots 406 as seen in the direction of propagation of branches408 (i.e. perpendicular to FIG. 4A). In FIG. 4B the beam spots arealigned parallel to longitudinal axis 404 of optical fiber 124, while inFIG. 4C the beam spots are aligned line 410 which is tilted at an anglerelative to longitudinal axis 404. It is noted that the use of threebranches in FIGS. 4A-C was selected for illustrative purposes only andis not meant to be limiting. It is also noted that, although beam spots406 are all shown located in fiber core 400, branches 408 may also befocused in cladding layer 402 to modify the cladding layer in additionto or instead of fiber core 400.

Returning to FIGS. 1 and 2, a fiber mount holds and controllably movesoptical fiber 124 such that the beam spot(s) may be aligned to targetregion 126 within the optical fiber. The fiber mount includespositioning apparatus 123 and fiber holder 122 which is coupled topositioning apparatus 123. Positioning apparatus 123 includes at leasttwo linear motion stages. The first linear motion stage moves opticalfiber 124 in a Z direction, substantially parallel to a direction ofpropagation of the pulses of laser light at the beam spot. The secondlinear translation stage moves the optical fiber in an X direction,which is substantially perpendicular to the direction of propagation ofthe pulses of laser light at the beam spot and substantiallyperpendicular to the longitudinal axis of optical fiber 124 at the beamspot. The Z direction is left-right in FIG. 4A and the X direction isleft-right in FIGS. 4B and 4C. A third linear translation stage to moveoptical fiber 124 in a Y direction may also be desired, particularly forexemplary systems in which only one beam spot is used for machining thediffractive structure. The Y direction is substantially parallel to thelongitudinal axis of optical fiber 124 at the beam spot, i.e. up-down inFIGS. 4A-C. It is noted that, although optical fiber 124 is shown to beheld in a vertical position by fiber holder 122 in FIGS. 1, 2, 3A, 3B,and 4A-C, it may be understood by one skilled in the art that opticalfiber 124 may be held horizontally, or at any other angle, instead.

These linear translation stages may desirably be computer-controlledmotion stages with micrometer resolution of a combined XY or XYZ motionstage (for example, a micron resolution XYZ motion stage manufactured byBurleigh). A computer-controlled, piezo-electric motion stage withnanometer-resolution (for example, a piezo-electric XY motion stagemanufactured by Queensgate) may also be included. In such a combinedtranslation stage, the computer-controlled motion stages may be used toalign the beam spot of the exemplary laser machining system to targetarea 126 of optical fiber 124, with the micrometer resolution motionstages providing coarse positioning and the piezo-electric motion stagesproviding fine positioning.

Additionally the fiber mount may include a rotational stage coupledbetween the linear translation stages of positioning apparatus 123 andoptical fiber 124 to rotate optical fiber 124 about its longitudinalaxis at the beam spot. This rotational stage may be desirably coupled insuch a manner as to rotate optical fiber 124 without rotating fiberholder 122. The rotational stage may desirably be a computer-controlledmotion stage with degree resolution or better.

It may be understood by one skilled in the art that the order of severalof the elements in the exemplary ultrafast laser machining systems ofFIGS. 1 and 2 may be rearranged without altering the function of thesystem. For example: harmonic generating crystal 106 may be locatedbefore variable attenuator 104 and/or shutter 102; variable attenuator104 may be located before shutter 102; polarization control means 110may be located before dichroic mirror 108; and shutter 102 may belocated anywhere along the beam path of the machining laser beam fromits present position to immediately before focusing mechanism 120.

The exemplary systems of FIGS. 1 and 2 also include an imaging system toimage the target region of the held optical fiber. These exemplaryimaging systems desirably include a light source to illuminate targetregion 126 of held optical fiber 124 and two digital cameras aligned toimage target region 126 from two substantially orthogonal directions tomonitor the alignment of the ultrafast laser machining system and theprogress of the processing. The use of two digital cameras atsubstantially orthogonal directions allows the operator to obtain athree dimensional view of target region 126 of optical fiber 124. Thisstereo view of target area 126 is desirable to properly locate the beamspot(s) within the optical fiber. Without the ability determine thethree dimensional position of the material being machined within opticalfiber 124 the manufacture of complex diffractive structures withinoptical fibers may be difficult. However, it is contemplated that manysimpler diffractive structures may be formed with only a two dimensionalview of target area 126.

FIGS. 1 and 2 each only show one of these digital cameras forsimplicity. In both of these exemplary systems, the digital camera isshown to image target area 126 in parallel with optical beam 134 usingthe focusing mechanism as a lens for the camera. FIG. 1 illustrateslight source 130 and digital camera 132 arranged to image target area126 in reflection. Optical beam 136 of light from light source 130 isreflected by beam splitter 128 so that it passes through dichroic mirror118 and focusing mechanism 120 to illuminate target area 126. Reflectedoptical beam 138 passes through focusing mechanism 120, dichroic mirror118, and beam splitter 128 and is captured by digital camera 132. Theimaging light from light source 130 may be substantially collimated byan included lens system (not separately shown). To reduce potentialchromatic aberrations of this image, the imaging light desirably has anarrow spectrum. Thus, although it may be desirable for the light sourceto be a light emitting diode or a diode laser, a filtered broad spectrumlight source may be used as well. Although the use of dichroic mirror118 in FIG. 1 to combine the machining beam and the imaging beamrequires that these light beams have different wavelengths, it may bedesirable for the two light sources to have similar wavelengths so thatfocusing mechanism 120 may focus both beams similarly. Any differencebetween the focal lengths of the microscope objective at theillumination wavelength and the peak wavelength of laser source 100 maybe compensated by the optics of digital camera 132 and/or additionaloptics between beam splitter 128 and digital camera 132 (not shown).

FIG. 2 illustrates light source 204 and digital camera 132 arranged toimage target area 126 in transmission. Optical beam 206 of light fromlight source 204 directly illuminates target area 126 in the oppositedirection of optical beam 134 of the laser pulses. Transmitted opticalbeam 138 passes through optical fiber 124, focusing mechanism 202, anddichroic mirror 118 and is captured by digital camera 132. It is notedthat exemplary imaging systems in which one, or both, of the digitalcamera image the target area in transmission, as in FIGS. 2 and 3B,require optical fiber 124 to be held by fiber holder 122 such that thereis a line of sight through target region 126 substantially perpendicularto the longitudinal axis of optical fiber 124.

Transmission imaging may be desirable to monitor the machined portionsof the optical fiber to allow feedback control of positioning apparatus123 during processing. This is because these index-altered regions maybe easier to identify by differences in the light refracted by themachined portions seen during transmission imaging, as opposed to thedifferences in reflection off of the machined portions seen duringreflection imaging. Alternatively, a combination of transmission andreflection imaging may be preferred. This may involve one digital camerathe target area imaging in reflection while the other digital camera isimaging the target area in transmission, or it may involve both digitalcameras imaging the target area in reflection and transmissionsequentially by switching between different lighting elements for eachviewing mode.

FIGS. 3A and 3B illustrate exemplary arrangements of digital cameras andlight sources around fiber holder 122 that may used with exemplaryembodiments of the present invention. FIG. 3A illustrates an exemplaryimaging system in which both digital cameras 132 and 302 are arranged toimage the target area of optical fiber 124 (viewed from above) inreflection. This exemplary arrangement uses only one light source forboth digital cameras. The light source includes a single lightingelement 300. This lighting element shines light along optical path 304at a 45° angle to the orthogonal optical paths 138 and 306 viewed,respectively, by digital cameras 132 and 302.

FIG. 3B illustrates an exemplary imaging system in which digital camera308 is arranged to image the target area of optical fiber 124 inreflection and digital camera 312 is arranged to image the target areain transmission. It is noted that neither digital camera in thisexemplary arrangement is aligned to view along an optical path collinearto optical path 134. Also, this exemplary arrangement uses one lightingelement for each digital camera. Lighting element 316 shines light alongoptical path 320 off of beam splitter 318 to illuminate the target areaof optical fiber 124. A portion of the light is reflected back alongoptical path 310 to be viewed by digital camera 308. Lighting element322 shines light along optical path 324 to illuminate the target area.At least a portion of this light is through optical fiber 124 alongoptical path 314 to be viewed by digital camera 312.

It is noted that the various exemplary arrangements of the digitalcameras and lighting elements in FIGS. 1, 2, 3A, and 3B are notexhaustive. Also, one skilled in the art may understand that theseexemplary arrangements of the digital cameras and lighting elements maybe combined to form additional exemplary arrangements.

An exemplary ultrafast laser machining system that may be used withexemplary methods of the present invention may also include an exemplaryin situ fiber monitor, such as those shown in FIGS. 7A and 7B, tomeasure properties of the diffractive structure during machining. Theexemplary in situ fiber monitor may include fiber coupled light source700 optically coupled to one end of optical fiber 124 and may includeone or more optical detectors 702 and/or 704 optically coupled tooptical fiber 124. The optical detector(s) may include opticalreflection detector 704 optically coupled to the same end of the opticalfiber as fiber coupled light source 700 via a means such as beamsplitter 706, as shown in FIG. 7B, and/or optical transmission detector702 optically coupled to the other end of the optical fiber as shown inFIG. 7A. If fiber coupled light source 700 is a narrow bandwidth lightsource the optical detector(s) may detect the total optical power of thelight transmitted, or reflected, by the diffractive structure. If abroad bandwidth light source is used, the optical detector(s) may beused to detect the optical power spectrum of the light transmitted, orreflected, by the diffractive structure.

Alternatively, in situ fiber monitoring may involve using one, or both,of the digital cameras to image light from the fiber coupled lightsource scattered by a portion of the diffractive structure duringformation of the diffractive structure.

FIG. 5 illustrates an exemplary method of forming a diffractivestructure in an optical fiber using an ultrafast laser machining system,such as the exemplary system of FIG. 1. The diffractive structure formedwithin the optical fiber may include one or more Bragg gratingstructures, photonic crystals, or diffractive lenses.

The optical fiber is mounted in a fiber mount of the ultrafast lasermachining system, step 500. The optical fiber is mounted such that thelongitudinal axis of the optical fiber is perpendicular to the beam pathof the pulses of laser light of the ultrafast laser machining system.

The target region of the optical fiber is illuminated with anillumination light, step 502. The target region may be illuminated bylight sources as illustrated in FIGS. 2A and 2B such that at least oneof the two digital camera digital cameras images the target region ofthe optical fiber in reflection and/or at least one of the two digitalcamera digital cameras images the target region of the optical fiber intransmission. The light source may include an element aligned toilluminate the target region of the optical fiber through the focusingmechanism of the ultrafast laser machining system, as shown in FIG. 2B(lighting element 222). Alternatively, the target area may beilluminated by scattered light from an in situ monitor. In thisalternative embodiment, light is coupled into the optical fiber andscattered off of partially machined sections of the diffractivestructure to illuminate the target region of the optical fiber. It isnoted that this alternative illumination method may be more desirablefor producing alignment images to monitor progress of the diffractivestructure than to determine the initial beam spot position.

The target region of the optical fiber is imaged with two digitalcameras aligned in substantially orthogonal directions, step 504. Thisproduces pairs of substantially orthogonal alignment images of thetarget region of the optical fiber that may be used to accuratelyidentify a location of diffractive structures in three dimensions, andpossibly the beam spot, within the optical fiber. As shown in FIGS. 1and 2B, one of the digital cameras may be aligned to image the targetregion through the focusing mechanism. It is noted that it may bedesirable for the two digital cameras to be aligned along the axes oftwo of the linear translation stages in the positioning apparatus of theultrafast laser machining system. This exemplary alignment may simplifycalculations relating to the alignment of the beam spot within theoptical fiber.

The initial position of the beam spot within the target region of theoptical fiber is determined, step 506. A number of exemplary methods maybe use to determine this location. If the positioning apparatus and thefiber holder have been precalibrated, this determination may be trivial,merely involving reading the setting of the motion stages in thepositioning apparatus. If these component have not been precalibrated,or do not have the desired accuracy, direct measurements using thealignment images may be used.

If the light source is aligned to illuminate the target region throughthe focusing mechanism, an illumination spot is formed by the lightsource. This illumination spot and the beam spot of the laser pulses areseparated by a predetermined distance based on their respective peakwavelengths. The optical fiber may be moved along the propagation axisof the laser pulses and the illumination light until the illuminationspot is focused on a surface of the optical fiber, as seen using thepairs of substantially orthogonal alignment images of the target regionof the optical fiber. This position, called the initial fiber position,may then be used to determine the initial position of the beam spotwithin the target region based on the predetermined distance between theillumination spot and the beam spot.

Alternatively, the pairs of substantially orthogonal alignment imagesmay be used to directly image the beam path of the laser pulses throughthe optical fiber. In this alternative embodiment, it is desirable togenerate a number of alignment pulses of laser light, which have a pulseenergy less than a machining pulse energy. This lower pulse energyprotects the material of the optical fiber from being prematurelymachined during alignment. Scattered light from the alignment pulses isimaged with the two digital cameras and the initial position of the beamspot is determined based on the resulting initial pair of substantiallyorthogonal alignment images.

Once the initial position of the beam spot is known, the beam spot isaligned to a starting position within the target region of the opticalfiber, step 508. The starting position is desirably within the portionof the optical fiber that is to be machined to form the diffractivestructure. Additionally, the starting position is desirably the pointwithin the portion to be machined for which the beam path of the laserpulses must pass through the greatest length of optical fiber materialto reach the beam spot. If more than one point fits the criteria of thestarting position, then any of these points may be selected. This pointis desirably selected because the laser pulses propagate differentlythrough the machined portions of the optical fiber material. This meansthat it is easier to predict the behavior of the laser pulses when theyonly transmitted through unmachined optical fiber material. Therefore,it is desirable to begin at the back of the fiber (i.e. the pointfarthest from the focusing mechanism) and work forward (or to begin atthe center and work out).

Alternatively, the starting position may be located at one side of theoptical fiber and the machining may progress from that side to theother. This starting position is the point, with the portion to bemachined, which is farthest from a plane that is parallel to the beampath of the laser pulses and that passes through the longitudinal axisof the optical fiber.

The beam spot is scanned along a machining path within the target regionof the optical fiber, step 510, as the pulses of laser light aregenerated to machine the optical fiber material, step 512. The pulses oflaser light desirably have a duration of less than about 1 ns. The laserpulses are desirably focused to the beam spot with the focusingmechanism and their pulse energy is controlled such that the fluence oflight in the beam spot exceeds a machining fluence level of the opticalfiber within region that has a predetermined machining volume. The sizeof this machining volume depends on the feature size needed to form thediffractive structure. Fine features may be desirable, but the use ofsmaller machining volumes increases the number of laser pulses needed tomachine the diffractive structure. These competing issues may lead totradeoffs in the selection of the machining volume desired. Machiningvolumes are typically greater than about 0.001 μm³, and may often exceedabout 125 μm³. Also, it is noted that the use of non-circularlypolarized light may alter the shape of the regions machined byindividual laser pulses. Therefore, it may be desirable to control thepolarization of the pulses of laser light incident on the target regionof the optical fiber.

As noted in above with regard to step 508, it is desirable that thelaser pulse only pass through unmachined optical fiber material.Therefore, the machining path is designed to pass the beam spot throughall of the portion of the optical fiber to be machined such that thebeam path of the plurality of pulses of laser light does not passthrough previously machined material of the optical fiber.

During scanning of the beam spot along the machining path, the pulses oflaser light are desirably generated at a constant repetition rate by theultrafast laser machining system. Also it is desirable for the pulseenergy of the laser pulses and the size of the beam spot to which theyare focused to remain substantially constant, so that the machiningvolume is substantially constant. The beam spot may also desirably bescanned through the material of the optical fiber with a constant scanrate. It is desirable to select the constant scan rate, the repetitionrate, and the machining volume such that a machined portion of thematerial of the optical fiber that is machined by one pulse of theplurality of pulses of laser light spatially overlaps with a previouslymachined portion of the material machined by a directly preceding pulseof the plurality of pulses of laser light. The selection of theseparameters is desirable to allow complete machining of the diffractivestructure.

The machining path may either be designed such that the beam spotremains within the portion of the optical fiber to be machined, or suchthat the beam spot is scanned through a larger region of the opticalfiber that includes the portion to be machined. The second type ofmachining path may simplify control of the positioning apparatus neededto perform the scanning, but it means that a shutter may be needed totransmit or block transmission of the laser pulses depending on whetherthe beam spot is within the portion of the optical fiber to be machinedor not.

Whichever method is used, it may be desirable to control the position ofthe beam spot within the target region of the optical fiber with anaccuracy of less than about 100 nm during scanning to improve thequality of the diffractive structure, although it is noted that fordiffractive structures designed for longer wavelengths lower tolerancesmay be used without any appreciable effect.

If the starting position is located at the back of the optical fiber orat one side of the optical fiber, a raster scan pattern may be used toscan the beam spot through the portion of the optical fiber to bemachined. Using this pattern, the beam spot is raster scanned over across-sectional plane of the optical fiber beginning at the startingpoint in a series of scan lines. If the starting position is at the backof the optical fiber, then the scan lines are perpendicular to the beampath of the laser pulses and the scanning may be performed in onedirection along the scan lines or in both. If the starting position ison one side of the optical fiber, then the scan lines are parallel tothe beam path of the laser pulses and the scanning is desirablyperformed along the scan lines from back to front. Once a raster scan ofthe current cross-sectional plane is completed the optical fiber may bemoved to step the cross-sectional plane to a new position along thelongitudinal axis of the optical fiber. The beam spot is then returnedto the starting position in the cross-sectional plane and the rasterscanning of the beam spot repeated for the new cross-sectional plane.This scanning and stepping process continues until the diffractivestructure has been completed, step 514.

If the starting position is located at the center of the optical fiber,a circular scan pattern may be used to scan the beam spot through theportion of the optical fiber to be machined. Using this pattern, thebeam spot is scanned over a cross-sectional plane of the optical fiberbeginning at the starting point in a series of scan circles. Once acircle around the longitudinal axis of the optical fiber is completed,the optical fiber may be stepped along a radial axis perpendicular tothe longitudinal axis of the optical fiber. This continues until theoutermost circle of the current cross-sectional plane is completed. Theoptical fiber may then be moved to step the cross-sectional plane to anew position along the longitudinal axis of the optical fiber. The beamspot is returned to the starting position in the cross-sectional planeand the beam spot through a new set of circles on this newcross-sectional plane. This scanning and stepping process continuesuntil the diffractive structure has been completed, step 514.

It is noted that the pairs of substantially orthogonal alignment imagesof the target region of the optical fiber may be monitored during step510 and 512 to provide feedback control of the positioning apparatus ofthe ultrafast laser machining system. This feedback control may bedesirable to improve the accuracy of scanning the beam spot along themachining path and, thus improve the quality of the resultingdiffractive structure.

Additionally, an in situ monitor may be used as part of step 514 todetermine when the diffractive structure is complete. In thisalternative embodiment, light is coupled into the optical fiber whichhas a predetermined coupled power level. Either a portion of the coupledlight that is reflected by partially machined sections of thediffractive structure or a portion of the coupled light that istransmitted through the optical fiber (or both) is detected. Thediffractive structure is determined to be complete when the detectedlight is substantially equal to a predetermined power level.

FIG. 6 illustrates an exemplary method of forming a repetitivediffractive structure in an optical fiber using an ultrafast lasermachining system with a plurality of parallel processing beam paths, orbranches. This exemplary method is similar to the exemplary method ofFIG. 5. It is noted that the diffractive structures created by theexemplary method of FIG. 6 are necessarily repetitive. If the parallelprocessing beam paths are substantially equally spaced in the directionof the longitudinal axis of the optical fiber, then the repetitivediffractive structure is a periodic diffractive structure, but in theparallel processing beam paths are not substantially equally spaced theresulting diffractive structure is not necessarily periodic.

The optical fiber is mounted in a fiber mount of the ultrafast lasermachining system, step 600. The optical fiber is mounted such that thelongitudinal axis of the optical fiber is perpendicular to the parallelprocessing beam paths of the pulses of laser light of the ultrafastlaser machining system.

As in the exemplary method of FIG. 5, the target region of the opticalfiber is illuminated with an illumination light, step 602, and thetarget region of the optical fiber is imaged with two digital camerasaligned in substantially orthogonal directions, step 504.

The initial positions, within the target region of the optical fiber, ofthe beam spot corresponding to the plurality of parallel processing beampaths are determined, step 606. The relative positions of the beam spotare desirably known. Therefore, the determination of one initial beamspot position may be used to determine the others. As in the exemplarymethod of FIG. 4, a number of exemplary methods may be use to determinethis location.

Once the initial positions of the beam spots are known, the beam spotsare each aligned to a starting position within the target region of theoptical fiber, step 608. Again because the relative positions of thebeams spots are desirably known aligning one beam spot to its initialposition should align all of the beam spots.

The beam spots are scanned in parallel along machining paths within thetarget region of the optical fiber, step 610, as the pulses of laserlight are generated and transmitted down the multiple parallelprocessing beam paths to machine the optical fiber material, step 612.Each machining path is designed to pass the corresponding beam spotthrough all of the portion of the optical fiber to be machined by thatbeam spot to form the corresponding section of the plurality of sectionsof the repetitive diffractive structure. It is noted that the machiningpaths are also desirably designed such that none of the parallelprocessing beam paths passes through previously machined material of theoptical fiber, whether the material was machined by the beam spotcorresponding that parallel processing beam path or another parallelprocessing beam path.

The scanning process continues until the machining paths are completedand the repetitive diffractive structure is finished, step 614. It isnoted that for certain repetitive diffractive structures, such as Bragggrating structures with hundreds of periods or more, it may be desirablefor the machining paths to scan the multiple beam spots through apattern such that each beam spot forms one period of the grating. Thisforms a grating structure with a number of periods equal to the numberof parallel processing beam paths. Because the number of parallelprocessing beam paths is likely to be significantly less than the numberof periods desired in the grating structure, the fiber is moved alongits longitudinal axis to an unmachined portion of the fiber adjacent tothe previously machined grating structure and the machining pathsrepeated so that another set of grating periods is formed. This processmay be repeated until the desired number of grating periods has beenformed.

Although illustrated and described above with reference to certainspecific embodiments, the present invention is nevertheless not intendedto be limited to the details shown. Rather, various modifications may bemade in the details within the scope and range of equivalents of theclaims and without departing from the invention.

1. An ultrafast laser machining system to form a diffractive structurein an optical fiber, comprising: a pulsed laser source for generating aplurality of pulses of laser light, each pulse of laser light having apulse energy equal to a machining energy level and a predetermined pulsewidth less than about 1 ns; optics aligned in a beam path of theplurality of pulses of laser light to focus the plurality of pulses to abeam spot; a fiber mount to hold and controllably move the optical fibersuch that the beam spot is aligned to a target region within the opticalfiber, the fiber mount including; a first linear translation stage tomove the optical fiber in a Z direction substantially parallel to adirection of propagation of the plurality of pulses of laser light atthe beam spot; a second linear translation stage to move the opticalfiber in a Y direction substantially perpendicular to the direction ofpropagation of the plurality of pulses of laser light at the beam spotand substantially parallel to the longitudinal axis of the optical fiberat the beam spot; and a fiber holder coupled to the two lineartranslation stages to hold the optical fiber; and an imaging system toimage the target region of the held optical fiber; wherein the pulsedlaser source includes: a pulsed laser oscillator to produce theplurality of pulses of laser light having a predetermined initial pulseenergy; and a variable attenuator aligned in the beam path of theplurality of pulses of laser light to control the pulse energy of theplurality of pulses at the machining energy level.
 2. An ultrafast lasermachining system according to claim 1, wherein the pulsed laser sourceincludes at least one of: a Cr:YAG solid state laser oscillator; aCr:Forsterite solid state laser oscillator; a Nd:YAG solid state laseroscillator; a Nd:YVO₄ solid state laser oscillator; a Nd:GdVO₄ solidstate laser oscillator; a Nd:YLF solid state laser oscillator; aNd:glass solid state laser oscillator; an Yb:YAG solid state laseroscillator; a Cr:LiSAF solid state laser oscillator; a Ti:Sapphire solidstate laser oscillator; a Pr:YLF solid state laser oscillator; a XeCIexcimer laser oscillator; a KrF excimer laser oscillator; an ArF excimerlaser oscillator; a F₂ excimer laser oscillator; a7-diethylamino-4-methylcoumarin dye laser oscillator; a benzoic acid,2-[6-(ethylamino)-3-(ethylimino)-2,7-dimethyl-3H-xanthen-9-yl]-ethylester, monohydrochloride dye laser oscillator; a4-dicyanmethylene-2-methyl-6-(p-dimethylaminostyryl)-4H -pyran dye laseroscillator; or a2-(6-(4-dimethylaminophenyl)-2,4-neopentylene-1,3,5-hexatrienyl)-3-methylbenzothiazoliumperchlorate dye laser oscillator.
 3. An ultrafast laser machining systemaccording to claim 1, wherein the predetermined pulse width of thepulsed laser source is less than about 100 ps.
 4. An ultrafast lasermachining system according to claim 1, wherein the plurality of pulsesof laser light generated by the pulsed laser source have a predeterminedpeak wavelength.
 5. An ultrafast laser machining system according toclaim 4, wherein the pulsed laser source includes: a pulsed laseroscillator to produce a plurality of initial pulses of laser lighthaving a fundamental peak wavelength, the fundamental peak wavelengthbeing longer than the predetermined peak wavelength; and a harmonicgeneration crystal to generate the plurality of pulses of laser lightfrom the plurality of initial pulses of laser light.
 6. An ultrafastlaser machining system according to claim 1, wherein the pulsed lasersource includes at least one of: a shutter aligned in the beam path ofthe plurality of pulses of laser light to control transmission of theplurality of pulses during laser machining of the diffractive structure;a polarization controller aligned in the beam path of the plurality ofpulses of laser light control a polarization of the pulses of laserlight generated by the ultrafast laser source.
 7. An ultrafast lasermachining system according to claim 1, wherein the optics include:guiding optics for guiding the pulses of laser light along the beam pathfrom the pulsed laser source to the target region of the held opticalfiber; and a focusing mechanism to focus the pulses of laser light to asubstantially diffraction limited beam spot within the target region. 8.An ultrafast laser machining system according to claim 7, wherein thefocusing mechanism includes a microscope objective with a numericalaperture in the range of up to about 1.5.
 9. An ultrafast lasermachining system according to claim 7, wherein the focusing mechanismincludes a microscope objective with a working distance in the range ofabout 0.8 mm to about 1.5 mm.
 10. An ultrafast laser machining systemaccording to claim 1, wherein the optics focus the plurality of pulsessuch that the beam spot has a machining diameter in the range of about100 nm to about 2 μm, the machining diameter defining a portion of thetarget region machined by one of the plurality of pulses of laser light.11. An ultrafast laser machining system according to claim 1, whereinthe fiber mount further includes at least one of: a third lineartranslation stage to move the optical fiber in an X directionsubstantially perpendicular to the direction of propagation of theplurality of pulses of laser light at the beam spot and substantiallyperpendicular to a longitudinal axis of the optical fiber at the beamspot; or a rotational stage coupled between the linear translationstages and the optical fiber to rotate the optical fiber about thelongitudinal axis of the optical fiber at the beam spot.
 12. Anultrafast laser machining system to form a diffractive structure in anoptical fiber, comprising: a pulsed laser source for generating aplurality of pulses of laser light, each pulse of laser light having apulse energy equal to a machining energy level and a predetermined pulsewidth less than about 1 ns; optics aligned in a beam oath of theplurality of pulses of laser light to focus the plurality of pulses to abeam spot; a fiber mount to hold and controllablv move the optical fibersuch that the beam spot is aligned to a target region within the opticalfiber, the fiber mount including; a first linear translation stage tomove the optical fiber in a Z direction substantially parallel to adirection of propagation of the plurality of pulses of laser light atthe beam spot; a second linear translation stage to move the opticalfiber in a Y direction substantially perpendicular to the direction ofpropagation of the plurality of pulses of laser light at the beam spotand substantially parallel to the longitudinal axis of the optical fiberat the beam spot; and a fiber holder coupled to the two lineartranslation stages to hold the optical fiber; a light source toilluminate the target region of the held optical fiber; and two digitalcameras aligned to image the target region of the held optical fiberfrom substantially orthogonal directions.
 13. An ultrafast lasermachining system according to claim 12, wherein the light source of theimaging system includes a lighting element arranged such that at leastone of the two digital cameras images the target region in reflection.14. An ultrafast laser machining system according to claim 12, wherein:the fiber mount holds the optical fiber with a line of sight through thetarget region substantially perpendicular to the longitudinal axis ofthe optical fiber; and the light source of the imaging system includes alighting element arranged such that one of the two digital camerasimages the target region in transmission along the line of sight.
 15. Anultrafast laser machining system according to claim 14, wherein thelight source of the imaging system includes another lighting elementarranged such the one of the two digital cameras further images thetarget region in reflection.
 16. An ultrafast laser machining systemaccording to claim 12, wherein: the fiber mount holds the optical fiberwith two substantially orthogonal lines of sight through the targetregion, the two substantially orthogonal lines of sight beingsubstantially perpendicular to the longitudinal axis of the opticalfiber; and the light source of the imaging system includes two lightingelements arranged such that each digital camera images the target regionin transmission along a corresponding one of the two substantiallyorthogonal lines of sight.
 17. An ultrafast laser machining systemaccording to claim 16, wherein the light source of the imaging systemfurther includes another lighting element arranged such one of the twodigital cameras further images the target region in reflection.
 18. Anultrafast laser machining system according to claim 12, wherein one ofthe two digital cameras of the imaging system is arranged to image thetarget region along a line of sight parallel with the beam path at thebeam spot.
 19. An ultrafast laser machining system to form a diffractivestructure in an optical fiber, comprising: a pulsed laser source forgenerating a plurality of pulses of laser light, each pulse of laserlight having a pulse energy equal to a machining energy level and apredetermined pulse width less than about 1 ns; optics aligned in a beampath of the plurality of pulses of laser light to focus the plurality ofpulses to a beam spot; a fiber mount to hold and controllably move theoptical fiber such that the beam spot is aligned to a target regionwithin the optical fiber, the fiber mount including; a first lineartranslation stage to move the optical fiber in a Z directionsubstantially parallel to a direction of propagation of the plurality ofpulses of laser light at the beam spot; a second linear translationstage to move the optical fiber in a Y direction substantiallyperpendicular to the direction of propagation of the plurality of pulsesof laser light at the beam spot and substantially parallel to thelongitudinal axis of the optical fiber at the beam spot; and a fiberholder coupled to the two linear translation stages to hold the opticalfiber; and an imaging system to image the target region of the heldoptical fiber; and an in situ fiber monitor.
 20. An ultrafast lasermachining system according to claim 19, wherein the in situ fibermonitor includes: a fiber coupled light source optically coupled to afirst end of the optical fiber; and at least one of; an opticalreflection detector optically coupled to the first end of the opticalfiber; or an optical transmission detector optically coupled to a secondend of the optical fiber.
 21. An ultrafast laser machining systemaccording to claim 20, wherein: the fiber coupled light source is anarrow bandwidth light source; and the at least one optical detectordetects a total optical power.
 22. An ultrafast laser machining systemaccording to claim 20, wherein: the fiber coupled light source is abroad bandwidth light source; and the at least one optical detectordetects an optical power spectrum.
 23. An ultrafast laser machiningsystem according to claim 19, wherein the in situ fiber monitorincludes: a fiber coupled light source optically coupled to a first endof the optical fiber; and at least one of the two digital cameras imageslight from the fiber coupled light source scattered by a portion of thediffractive structure during formation of the diffractive structure. 24.An ultrafast laser machining system according to claim 1, furthercomprising a fluence controller to control a fluence of the beam spot ofthe ultrafast laser micro-machining system in the target region of theheld optical fiber, thereby controlling a volume of the target regionmachined by one of the pulses of laser light.
 25. An ultrafast lasermachining system according to claim 1, wherein the plurality of pulsesof laser light generated by the pulsed laser source have a predeterminedpulse repetition rate.
 26. An ultrafast laser machining system accordingto claim 25, wherein the predetermined pulse repetition rate is greaterthan about 1 KHz.
 27. An ultrafast laser machining system to form aBragg grating structure in an optical fiber, comprising: a pulsed lasersource for generating a plurality of pulses of laser light, each pulseof laser light having a pulse energy approximately equal to a machiningenergy level and a predetermined pulse width less than about 1 ns; abeam divider aligned in a beam path of the plurality of pulses of laserlight to divide the beam path into a plurality of branches such that aportion of each pulse of laser light is propagated along each of theplurality of branches optics aligned in the plurality of branches of thebeam path to focus the plurality of portions of each pulse of laserlight to a plurality of beam spots that have substantially equalfluence, each beam spot corresponding to one of the plurality ofbranches; a fiber mount to hold and controllably move the optical fibersuch that each beam spot is aligned to a target region within theoptical fiber, the fiber mount including; a linear translation stage tomove the optical fiber in a Z direction substantially parallel to adirection of propagation of the plurality of pulses of laser light atthe plurality of beam spots; and a fiber holder coupled to the lineartranslation stage to hold the optical fiber; and an imaging system toimage the target region of the held optical fiber.
 28. An ultrafastlaser machining system according to claim 27, wherein the predeterminedpulse width of the pulsed laser source is less than about 100 ps.
 29. Anultrafast laser machining system according to claim 27, wherein thepulsed laser source includes: a pulsed laser oscillator to produce theplurality of pulses of laser light having a predetermined initial pulseenergy; and a variable attenuator aligned in the beam path of theplurality of pulses of laser light to control the pulse energy of theplurality of pulses at the machining energy level.
 30. An ultrafastlaser machining system according to claim 27, further comprising guidingoptics for guiding the pulses of laser light along the beam path fromthe pulsed laser source to the beam divider.
 31. An ultrafast lasermachining system according to claim 27, wherein the beam dividerincludes a mask including a plurality of pinholes corresponding to theplurality of branches.
 32. An ultrafast laser machining system accordingto claim 31, wherein the optics include a microscope objective with anumerical aperture in the range of up to about 1.5.
 33. An ultrafastlaser machining system according to claim 31, wherein the optics includea microscope objective with a working distance in the range of about 0.8mm to about 1.5 mm.
 34. An ultrafast laser machining system according toclaim 31, wherein the optics include a microscope objective with amagnification in the range of about 1 times to about 100 times.
 35. Anultrafast laser machining system according to claim 31, wherein the beamdivider further includes a beam expander to expand a height of the beampath such that the plurality of pinholes of the mask are irradiated bythe plurality of pulses of laser light.
 36. An ultrafast laser machiningsystem according to claim 35, wherein the beam expander includes atleast one of a cylindrical lens, an aspherical lens or a spherical lens.37. An ultrafast laser machining system according to claim 27, wherein:the beam divider includes a diffractive optical element; and the opticsinclude a scan lens.
 38. An ultrafast laser machining system accordingto claim 37, wherein the scan lens is a telecentric scan lens.
 39. Anultrafast laser machining system according to claim 27, wherein theoptics include a plurality of microlenses, each microlens aligned in oneof the plurality of branches of the beam path.
 40. An ultrafast lasermachining system according to claim 27, wherein the plurality of beamspots are focused by the optics to a plurality of points along a linethat is substantially parallel to the longitudinal axis of the opticalfiber.
 41. An ultrafast laser machining system according to claim 27,wherein the plurality of beam spots are focused by the optics to aplurality of points along a line that that has a predetermined anglerelative to the longitudinal axis of the optical fiber.
 42. An ultrafastlaser machining system according to claim 27, wherein the optics focusthe plurality of pulses such that each of the plurality of beam spotshas a machining diameter in the range of about 100 nm to about 2 μm, themachining diameter defining a portion of the target region machined byone of the plurality of pulses of laser light.
 43. An ultrafast lasermachining system according to claim 27, wherein the fiber mount furtherincludes at least one of: another linear translation stage coupled tothe linear translation stage to move the optical fiber in an X directionsubstantially perpendicular to the direction of propagation of theplurality of pulses of laser light at the plurality of beam spots andsubstantially perpendicular to a longitudinal axis of the optical fiberat the plurality of beam spots; or a rotational stage coupled betweenthe linear translation stage and the optical fiber to rotate the opticalfiber about the longitudinal axis of the optical fiber at the pluralityof beam spots.
 44. An ultrafast laser machining system according toclaim 27, wherein the fiber mount further includes another lineartranslation stage to move the optical fiber in a Y directionsubstantially perpendicular to the direction of propagation of theplurality of pulses of laser light at the plurality of beam spots andsubstantially parallel to the longitudinal axis of the optical fiber atthe plurality of beam spots.
 45. An ultrafast laser machining systemaccording to claim 27, wherein the imaging system includes; a lightsource to illuminate the target region of the held optical fiber; andtwo digital cameras aligned to image the target region of the heldoptical fiber from substantially orthogonal directions.
 46. An ultrafastlaser machining system according to claim 45, wherein the light sourceof the imaging system includes a lighting element arranged such that atleast one of the two digital cameras images the target region inreflection.
 47. An ultrafast laser machining system according to claim45, wherein: the fiber mount holds the optical fiber with a line ofsight through the target region substantially perpendicular to thelongitudinal axis of the optical fiber; and the light source of theimaging system includes a lighting element arranged such that one of thetwo digital cameras images the target region in transmission along theline of sight.
 48. An ultrafast laser machining system according toclaim 47, wherein the light source of the imaging system includesanother lighting element arranged such the one of the two digitalcameras further images the target region in reflection.
 49. An ultrafastlaser machining system according to claim 27, further comprising an insitu fiber monitor.
 50. An ultrafast laser machining system according toclaim 49, wherein the in situ fiber monitor includes: a fiber coupledlight source optically coupled to a first end of the optical fiber; andat least one of; an optical reflection detector optically coupled to thefirst end of the optical fiber; or an optical transmission detectoroptically coupled to a second end of the optical fiber.
 51. An ultrafastlaser machining system according to claim 49, wherein the in situ fibermonitor includes: a fiber coupled light source optically coupled to afirst end of the optical fiber; and at least one of the two digitalcameras images light from the fiber coupled light source scattered by aportion of the diffractive structure during formation of the diffractivestructure.
 52. An ultrafast laser machining system according to claim27, further comprising a fluence controller to control the substantiallyequal fluence of the plurality of beam spots of the ultrafast lasermicro-machining system in the target region of the held optical fiber,thereby controlling a volume of the target region machined by each ofthe plurality of beam spots during one of the pulses of laser light. 53.An ultrafast laser machining system according to claim 27, wherein theplurality of pulses of laser light generated by the pulsed laser sourcehave a predetermined pulse repetition rate.
 54. An ultrafast lasermachining system according to claim 51, wherein the predetermined pulserepetition rate is greater than about 1 KHz.